Scrubbers and wet benches
in microelectronics

The purity of the air we breath every day is not important only for our health, but also for the quality of the processes assisted by a gas cleaning system: this is true for an epitaxy reactor, an Etch/Rinse/Dry Wet Bench, a PECVD metal deposition line, a diffusion furnace.

Our units, while ensuring a high abatement efficiency, offer a flexible real-time control of the variable flow/pressure demands from the work environment.