Developed for single-wafer reactors with up to 200 slpm H 2 nominal, is used also for Nitruration processes with optional pH control. Its working principle is only wet with three stages of abatement: the exhaust is normally atmospheric, still allowing the gas compression for priming of Hydrogen Recovery plants. All the active parts, therefore subject to maintenance, are accessible from the front side; this and its small footprint allow more units to be placed side by side in compact modules, either in Grey Area and outside.