Etching Baths Preparation

 

In many etching processes, solutions like DHF, SC1, SC2 etc. are mixed in the process tank after the previous bath is exhausted, consuming time for mix preparation plus its thermostating.

Our dosing units prepare the bath (either pure or in mixture) in gravimetric mode for the amount required by the process tank with a resolution of 2 grams, thermocontrolled within +/- 1°C, recirculated and filtered at 0.1 µm: the downtime is then limited only to tank drain and refill from our tool.

Our unit is based on a digital scale supporting the batching tank, the recirculation pump for filtration and addressing to the process tank, the heating/cooling unit; its Polypropylene cabinet houses also the dosing valves and the local programming console.

It is generally intended for a direct link with CDSs, but for low usage chemicals each cabinet can be sided by a module for 1-2 drums up to 25 lt: the withdraw is performed by the recirculation pump.Any wetted part in liquid area is manufactured out of PTFE and PFA, the electropneumatic components are segregated in a compartment fluxed with Nitrogen, both sections are vented: only the scale is in Grey Area. 


CIRECO s.r.l. Via Buffoni 31 - 21012 Cassano Magnago (VA) - ITALY - Tel. 0331.200.141 - Fax 0331.281.300