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Etching
Baths Preparation In many
etching processes, solutions like DHF, SC1, SC2 etc. are mixed in the process
tank after the previous bath is exhausted, consuming time for mix preparation
plus its thermostating. Our dosing
units prepare the bath (either pure or in mixture) in gravimetric mode for
the amount required by the process tank with a resolution of 2 grams,
thermocontrolled within +/- 1°C, recirculated and filtered at 0.1 µm: the downtime is then limited only to tank
drain and refill from our tool. Our unit is based on a digital scale supporting the
batching tank, the recirculation pump for filtration and addressing to the
process tank, the heating/cooling unit; its Polypropylene cabinet houses also
the dosing valves and the local programming console. It is generally intended for a direct link with
CDSs, but for low usage chemicals each cabinet can be sided by a module for
1-2 drums up to 25 lt: the withdraw is performed by the recirculation pump.Any
wetted part in liquid area is manufactured out of PTFE and PFA, the
electropneumatic components are segregated in a compartment fluxed with
Nitrogen, both sections are vented: only the scale is in Grey Area. |
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CIRECO
s.r.l. Via Buffoni 31 - 21012 Cassano Magnago (VA) - ITALY - Tel. 0331.200.141
- Fax 0331.281.300